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4 A B C D E F G H I L M N Ö P R S T U V W X
Reactio Reactiv

Reactive ion deep etching (also known as the Bosch process) is a dry etching process that produces a particularly anisotropic etch profile. Through an iterative process sequence of etching and passivation, the sidewalls of the material can be protected in already etched cavities, creating very deep structures.